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1

Quantitative measurement of voltage contrast in scanning electron microscope images for in-line resistance inspection of incomplete contact

Matsui, Miyako, Yano, Tasuku, Odaka, Takayuki, Nagaishi, Hiroshi, Sakurai, Koichi

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.54 MB

english, 2012

2

High-energy scanning electron microscope for the observation of subsurface structures

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2005

Language:

english

File:

PDF, 832 KB

english, 2005

3

Dielectric-thickness dependence of damage induced by electron-beam irradiation on metal nitride oxide semiconductor gate pattern

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2008

Language:

english

File:

PDF, 140 KB

english, 2008

4

Localization of the central executive system in working memory by fMRI: Utilization of the digit-span task

Maesawa, Satoshi, Futamura, Miyako, Fujii, Masazumi, Matsui, Yasuyuki, Wakabayashi, Toshihiko

Journal:

Higher Brain Function Research

Year:

2014

File:

PDF, 2.51 MB

2014

5

Using Auger Electron Spectroscopy for Chemical Analysis of Plasma Damage Induced by Reactive Ion Etching of SiO 2

Matsui, Miyako, Uchida, Fumihiko, Katsuyama, Kiyomi, Tokunaga, Takafumi, Kojima, Masayuki

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 945 KB

1998

6

Mechanism of highly selective SiO 2 etching over Si 3 N 4 using a cyclic process with BCl 3 and fluorocarbon gas chemistries

Matsui, Miyako, Usui, Tatehito, Kuwahara, Kenichi

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2020

Language:

english

File:

PDF, 2.49 MB

english, 2020

7

Role of surface-reaction layer in HBr/fluorocarbon-based plasma with nitrogen addition formed by high-aspect-ratio etching of polycrystalline silicon and SiO 2 stacks

Iwase, Taku, Matsui, Miyako, Yokogawa, Kenetsu, Arase, Takao, Mori, Masahito

Journal:

Japanese Journal of Applied Physics

Year:

2016

Language:

english

File:

PDF, 997 KB

english, 2016

8

Anxiety and Depression in Patients with Parkinson's Disease

Yamanishi, Toshiyuki, Tachibana, Hisao, Oguru, Miyako, Matsui, Kiyohiro, Toda, Kazuo, Okuda, Bungo, Oka, Nobuyuki

Journal:

Internal Medicine

Year:

2013

Language:

english

File:

PDF, 257 KB

english, 2013

9

Observation of surface reaction layers formed in highly selective SiO[sub 2] etching

Matsui, Miyako, Tatsumi, Tetsuya, Sekine, Makoto

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2001

Language:

english

File:

PDF, 717 KB

english, 2001

10

Analysis of SiO[sub 2]-to-Si[sub 3]N[sub 4] selectivity in reactive ion etching using additional O[sub 2] gas

Matsui, Miyako, Uchida, Fumihiko, Kojima, Masayuki, Tokunaga, Takafumi, Yano, Fumiko, Hasegawa, Masaki

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2002

Language:

english

File:

PDF, 949 KB

english, 2002

11

Ky-2, a Histone Deacetylase Inhibitor, Enhances High-Salinity Stress Tolerance in Arabidopsis thaliana

Sako, Kaori, Kim, Jong-Myong, Matsui, Akihiro, Nakamura, Kotaro, Tanaka, Maho, Kobayashi, Makoto, Saito, Kazuki, Nishino, Norikazu, Kusano, Miyako, Taji, Teruaki, Yoshida, Minoru, Seki, Motoaki

Journal:

Plant and Cell Physiology

Year:

2015

Language:

english

File:

PDF, 1009 KB

english, 2015

12

Replications of Two Closely Related Groups of Jumbo Phages Show Different Level of Dependence on Host-encoded RNA Polymerase

Matsui, Takeru, Yoshikawa, Genki, Mihara, Tomoko, Chatchawankanphanich, Orawan, Kawasaki, Takeru, Nakano, Miyako, Fujie, Makoto, Ogata, Hiroyuki, Yamada, Takashi

Journal:

Frontiers in Microbiology

Year:

2017

Language:

english

File:

PDF, 2.01 MB

english, 2017

13

Quantitative measurement of voltage contrast in scanning electron microscope images for in-line resistance inspection of wafers

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2010

Language:

english

File:

PDF, 471 KB

english, 2010

14

Evaluation of damage induced by electron-beam irradiation to metal-oxide semicondoctor gate pattern and method for damage-free inspection

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2007

Language:

english

File:

PDF, 912 KB

english, 2007

15

Relationship of etch reaction and reactive species flux in C[sub 4]F[sub 8]/Ar/O[sub 2] plasma for SiO[sub 2] selective etching over Si and Si[sub 3]N[sub 4]

Matsui, Miyako, Tatsumi, Tetsuya, Sekine, Makoto

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2001

Language:

english

File:

PDF, 452 KB

english, 2001

16

Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2003

Language:

english

File:

PDF, 594 KB

english, 2003

17

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Metrology, Inspection, and Process Control for Microlithography XXIII - Quantitative measurement of voltage contrast in SEM images for in-line resistance inspection of wafers manufactured for SRAM

Matsui, Miyako, Allgair, John A., Raymond, Christopher J., Odaka, Takahiro, Nagaishi, Hiroshi, Sakurai, Koichi

Year:

2009

Language:

english

File:

PDF, 351 KB

english, 2009

18

BENEFITS OF COMBINING DONEPEZIL PLUS TRADITIONAL JAPANESE HERBAL MEDICINE ON COGNITION AND BRAIN PERFUSION IN ALZHEIMER'S DISEASE: A 12-WEEK OBSERVER-BLIND, DONEPEZIL MONOTHERAPY CONTROLLED TRIAL

Masahiro Maruyama, Naoki Tomita, Koh Iwasaki, Mari Ootsuki, Toshifumi Matsui, Miyako Nemoto, Nobuyuki Okamura, Makoto Higuchi, Miho Tsutsui, Tomoko Suzuki, Takashi Seki, Tomohiro Kaneta, Katsutoshi Fu

Journal:

Journal of the American Geriatrics Society

Year:

2006

Language:

english

File:

PDF, 119 KB

english, 2006

19

Clinical correlates of anhedonia in patients with Parkinson's disease

Matsui, Kiyohiro, Tachibana, Hisao, Yamanishi, Toshiyuki, Oguru, Miyako, Toda, Kazuo, Okuda, Bungo, Oka, Nobuyuki

Journal:

Clinical Neurology and Neurosurgery

Year:

2013

Language:

english

File:

PDF, 487 KB

english, 2013

20

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes

Matsui, Miyako, Nozoe, Mari, Arauchi, Keiko, Takafuji, Atsuko, Nishiyama, Hidetoshi, Goto, Yasushi, Herr, Daniel J. C.

Year:

2002

Language:

english

File:

PDF, 391 KB

english, 2002

21

Contribution of Peroxidation Products to Oxidative Inactivation of Rat Liver Microsomal Glucose-6-Phosphatase

Ohyashiki, Takao, Kamata, Kanae, Takeuchi, Miyako, Matsui, Katsuhiko

Journal:

Journal of Biochemistry

Year:

1995

Language:

english

File:

PDF, 739 KB

english, 1995

22

Detecting Defects in Cu Metallization Structures by Electron-Beam Wafer Inspection

Matsui, Miyako, Zhaohui, Cheng, Nozoe, Mari, Torii, Katsuhiro

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 673 KB

english, 2004

23

Jugular bulb position in the cranial base and its relation to cranial venous system.

TSUNODA, ATSUNOBU, YAMASHITA, KOICHI, MATSUI, MIYAKO, KOMATSUZAKI, ATSUSHI

Journal:

Nippon Jibiinkoka Gakkai Kaiho

Year:

1992

Language:

english

File:

PDF, 1.07 MB

english, 1992

24

Low-energy Ion Scattering Measurement of Near-surface Damage Induced by the SiO 2 Dry-Etching Process

Matsui, Miyako, Uchida, Fumihiko, Katsuyama, Kiyomi, Tokunaga, Takafumi, Kojima, Masayuki

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 423 KB

1998

25

Aspiration Pneumonia and Insular Hypoperfusion in Patients with Cerebrovascular Disease

Nobuyuki Okamura, Masahiro Maruyama, Takae Ebihara, Toshifumi Matsui, Miyako Nemoto, Hiroyuki Arai, Hidetada Sasaki, Kazuhiko Yanai

Journal:

Journal of the American Geriatrics Society

Year:

2004

Language:

english

File:

PDF, 244 KB

english, 2004

26

P3-033 Cerebrospinal fluid Tau and periventricular white matter lesions in stable and progressive mild cognitive impairment

Maruyama, Masahiro, Matsui, Toshifumi, Tanji, Haruko, Nemoto, Miyako, Tomita, Naoki, Ootsuki, Mari, Arai, Hiroyuki, Sasaki, Hidetada

Journal:

Neurobiology of Aging

Year:

2004

Language:

english

File:

PDF, 324 KB

english, 2004

27

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 27 February 2011)] Metrology, Inspection, and Process Control for Microlithography XXV - CD-SEM image-distortion measured by view-shift method

Inoue, Osamu, Kawasaki, Takahiro, Matsui, Miyako, Kawada, Hiroki, Raymond, Christopher J.

Year:

2011

Language:

english

File:

PDF, 580 KB

english, 2011

28

Challenging for preservation of higher cognitive functions during awake surgery

Matsui, Yasuyuki, Maesawa, Satoshi, Futamura, Miyako, Tobinaga, Maki, Fujii, Masazumi

Journal:

Higher Brain Function Research

Year:

2015

File:

PDF, 1.10 MB

2015

29

Transcriptome Analysis of the Hierarchical Response of Histone Deacetylase Proteins That Respond in an Antagonistic Manner to Salinity Stress

Ueda, Minoru, Matsui, Akihiro, Watanabe, Shunsuke, Kobayashi, Makoto, Saito, Kazuki, Tanaka, Maho, Ishida, Junko, Kusano, Miyako, Seo, Mitsunori, Seki, Motoaki

Journal:

Frontiers in Plant Science

Year:

2019

Language:

english

File:

PDF, 2.26 MB

english, 2019

30

Rice-ArabidopsisFOX line screening with FT-NIR-based fingerprinting for GC-TOF/MS-based metabolite profiling

Makoto Suzuki, Miyako Kusano, Hideki Takahashi, Yumiko Nakamura, Naomi Hayashi, Makoto Kobayashi, Takanari Ichikawa, Minami Matsui, Hirohiko Hirochika, Kazuki Saito

Journal:

Year:

2010

Language:

english

File:

PDF, 532 KB

english, 2010

31

Relationship between formation of surface-reaction layers and flux of dissociated species in C 4 F 8 /Ar plasma for SiO 2 etching using pulsed-microwave plasma

Matsui, Miyako, Usui, Tatehito, Yasunami, Hisao, Ono, Tetsuo

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2016

Language:

english

File:

PDF, 1.45 MB

english, 2016

32

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Metrology, Inspection, and Process Control for Microlithography XX - Evaluation of damage induced by electron beam irradiation to MOS gate pattern and method for damage-free inspection

Matsui, Miyako, Machida, Syuntaro, Mine, Toshiyuki, Hozawa, Kazuyuki, Watanabe, Kikuo, Goto, Yasushi, Inoue, Jiro, Nagaishi, Hiroshi, Archie, Chas N.

Year:

2006

Language:

english

File:

PDF, 485 KB

english, 2006

33

Indocyanine Green Videoangiographic Findings in Detachment of the Retinal Pigment Epithelium

Yuzawa, Mitsuko, Kawamura, Akiyuki, Yamaguchi, Chikayo, Shouda, Miho, Shimoji, Miyako, Matsui, Mizuo

Journal:

Year:

1995

Language:

english

File:

PDF, 2.28 MB

english, 1995

34

Pulmonary Ground-Glass Opacity (GGO) Lesions–Large Size and a History of Lung Cancer are Risk Factors for Growth

Hiramatsu, Miyako, Inagaki, Takuya, Inagaki, Tomoya, Matsui, Yoshio, Satoh, Yukitoshi, Okumura, Sakae, Ishikawa, Yuichi, Miyaoka, Etsuo, Nakagawa, Ken

Journal:

Journal of Thoracic Oncology

Year:

2008

Language:

english

File:

PDF, 533 KB

english, 2008

35

Long-term cognitive benefits of donepezil in Alzheimer’s disease: A retrospective comparison between 1994–1999 and 2000–2004

Naoki Tomita, Mari Ootsuki, Masahiro Maruyama, Toshifumi Matsui, Miyako Higuchi, Miho Tsutsui, Takashi Seki, Koh Iwasaki, Masako Tamamizu, Takashi Sozu, Isao Yoshimura, Katsutoshi Furukawa, Hiroyuki A

Journal:

Geriatrics & Gerontology International

Year:

2007

Language:

english

File:

PDF, 198 KB

english, 2007

36

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Metrology, Inspection, and Process Control for Microlithography XXV - Quantitative measurement of voltage contrast in SEM images for in-line resistance inspection of incomplete contact

Raymond, Christopher J., Matsui, Miyako, Yano, Tasuku, Odaka, Takayuki

Year:

2011

Language:

english

File:

PDF, 753 KB

english, 2011

37

Effect of plasma dissociation on fluorocarbon layers formed under C 4 F 8 /Ar pulsed plasma for SiO 2 etching

Matsui, Miyako, Usui, Tatehito, Ono, Tetsuo

Journal:

Japanese Journal of Applied Physics

Year:

2017

Language:

english

File:

PDF, 3.04 MB

english, 2017

38

Cerebrospinal Fluid Tau Protein and Periventricular White Matter Lesions in Patients With Mild Cognitive Impairment

Maruyama, Masahiro, Matsui, Toshifumi, Tanji, Haruko, Nemoto, Miyako, Tomita, Naoki, Ootsuki, Mari, Arai, Hiroyuki, Sasaki, Hidetada

Journal:

Archives of Neurology

Year:

2004

Language:

english

File:

PDF, 102 KB

english, 2004

39

Different Radiation Susceptibility among Five Strains of Mice Detected by a Skin Reaction

IWAKAWA, MAYUMI, NODA, SHUHEI, OHTA, TOSHIE, OHIRA, CHISA, LEE, RYONFA, GOTO, MIYAKO, WAKABAYASHI, MIYUKI, MATSUI, YOSHIFUMI, HARADA, YOSHINOBU, IMAI, TAKASHI

Journal:

Journal of Radiation Research

Year:

2003

Language:

english

File:

PDF, 2.48 MB

english, 2003

40

Mechanism of highly selective SiO 2 contact hole etching

Matsui, Miyako, Tatsumi, Tetsuya, Sekine, Makoto

Journal:

Plasma Sources Science and Technology

Year:

2002

Language:

english

File:

PDF, 105 KB

english, 2002

41

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - In-line inspection resistance mapping using quantitative measurement of voltage contrast in SEM images

Matsui, Miyako, Allgair, John A., Raymond, Christopher J., Anan, Yoshihiro, Odaka, Takayuki, Nagaishi, Hiroshi, Sakurai, Koichi

Year:

2008

Language:

english

File:

PDF, 337 KB

english, 2008

42

Cerebrospinal fluid neprilysin is reduced in prodromal Alzheimer's disease

Masahiro Maruyama, Makoto Higuchi, Yoshie Takaki, Yukio Matsuba, Haruko Tanji, Miyako Nemoto, Naoki Tomita, Toshifumi Matsui, Nobuhisa Iwata, Hiroaki Mizukami, Shin-Ichi Muramatsu, Keiya Ozawa, Takaom

Journal:

Annals of Neurology

Year:

2005

Language:

english

File:

PDF, 1.03 MB

english, 2005

43

Plasma Homocysteine and Risk of Coexisting Silent Brain Infarction in Alzheimer’s Disease

Matsui, Toshifumi, Nemoto, Miyako, Maruyama, Masahiro, Yuzuriha, Takefumi, Yao, Hiroshi, Tanji, Haruko, Ootsuki, Mari, Tomita, Naoki, Matsushita, Sachio, Higuchi, Susumu, Yoshida, Yo-ichi, Seki, Takas

Journal:

Neurodegenerative Diseases

Year:

2005

Language:

english

File:

PDF, 197 KB

english, 2005

44

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Dielectric-thickness dependence of damage induced by electron-beam irradiation of MNOS gate pattern

Matsui, Miyako, Archie, Chas N., Mine, Toshiyuki, Hozawa, Kazuyuki, Watanabe, Kikuo, Inoue, Jiro, Nagaishi, Hiroshi

Year:

2007

Language:

english

File:

PDF, 289 KB

english, 2007

45

Metabolomics reveals comprehensive reprogramming involving two independent metabolic responses of Arabidopsis to UV-B light

Miyako Kusano, Takayuki Tohge, Atsushi Fukushima, Makoto Kobayashi, Naomi Hayashi, Hitomi Otsuki, Youichi Kondou, Hiroto Goto, Mika Kawashima, Fumio Matsuda, Rie Niida, Minami Matsui, Kazuki Saito, Al

Journal:

The Plant Journal

Year:

2011

Language:

english

File:

PDF, 1.14 MB

english, 2011

46

Modified radiosensitivity of pancreatic cancer xenografts by farnesyl protein transferase inhibitor and MEK inhibitor

Matsui, Yoshifumi, Goto, Miyako, Iwakawa, Mayumi, Asano, Takehide, Kenmochi, Takashi, Imai, Takashi, Ochiai, Takenori

Journal:

Oncology Reports

Year:

2003

Language:

english

File:

PDF, 1.09 MB

english, 2003

47

Surface analysis of polysilicon gate etching by pulsed-microwave plasma

Matsui, Miyako, Morimoto, Michikazu, Ikeda, Norihiko, Yokogawa, Kenetsu

Journal:

Japanese Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 492 KB

english, 2014

48

Low-energy Ion-scattering Spectroscopic Analysis of Structural Damage in Si Substrate under Ultrathin SiO 2 after Gate Etching

Matsui, Miyako, Uchida, Fumihiko, Tokunaga, Takafumi, Enomoto, Hiroyuki, Umezawa, Tadashi

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 262 KB

english, 1999

49

In-Situ Measurement of H e + Stopping in Si Layers by Low-Energy Ion-Scattering Spectroscopy

Matsui, Miyako, Uchida, Fumihiko, Nakagawa, Kiyokazu, Nishida, Akio

Journal:

Japanese Journal of Applied Physics

Year:

1996

File:

PDF, 513 KB

1996

50

Integrative omics approaches revealed a crosstalk among phytohormones during tuberous root development in cassava

Utsumi, Yoshinori, Tanaka, Maho, Utsumi, Chikako, Takahashi, Satoshi, Matsui, Akihiro, Fukushima, Atsushi, Kobayashi, Makoto, Sasaki, Ryosuke, Oikawa, Akira, Kusano, Miyako, Saito, Kazuki, Kojima, Mik

Journal:

Plant Molecular Biology

Year:

2020

File:

PDF, 6.22 MB

2020

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